Life Saving System (LSS) is the most important and essential part of the facility, required for any cleanroom facility with safety concerns of any kind. Process safety plays most vital role in any plant as in addition to the administrative safety policies, Safety of the process equipment’s and facilities also contributes significantly in the operations. Some of major LSS Packages catered are:
Critical cleanroom facilities such as semiconductor industries need fire suppression system other than water based as the process equipment’s and products used in cleanroom are electronic and prone to short circuit issues. Hence specialized gas suppression system will be used in such cases where upon fire detection (either automatic or manual); Fire suppression system releases an inert gas into the cleanrooms wit approved oxygen levels in the gas so that fire can be suppressed while no damage can be done to the human beings. However, it is strongly advised to vacate the vicinity in case of fire alarm. Some such Gas suppression systems are NOVAC, FM-200, HALON, etc.
Bulk and specialty gases are used in significant amount in some of the cleanroom plants such as semiconductor facilities. In such plants, there will be an extensive amount of piping distribution system with Gas Cabinets, Gas Panels, Regulators, etc., right from the source till the multiple points of use. To ensure process and personnel safety from any accidental leakage of these gases, a high precision Gas detection system will be implemented based on the gases being used. These detectors are programmed in turn with a controller so that in case of any gas leak detection, Alarm will be initiated and also the source of the gas will be cut-off.
Various interlocks can be deployed to ensure personnel safety in case of any emergency arising in the cleanroom facility such as: